Japan Pionics (JPC) which produces and sells gas purifiers and waste gas processors for semiconductor plants is going to deliver purifiers of carbon dioxide (CO2) and clean dry air (CDA) to the development center of the major semiconductor foundry in Hsinchu, Taiwan in this spring.

It is the first time for JPC to deliver either CO2 or CDA to the foundry. The demonstrative verification has already been completed with a scheduled operation to start from July.

The capacity of the equipment to be delivered is 100Nm3 or more/h x 1 for CO2 and 5000 m3 or more /h x 1. As for the gas purity at the outlet side, impurities are controlled to 1ppb (8N) or less for either.

It is assumed that a purified CO2 will be used to remove static electricity of pure water used in the lithographic process and a purified CDA will be used for purging respectively.

CO2 in particular has been extensively used these years in the lithographic process or a high-pressure cleaning in semiconductor plants to produce memories. JPC and other purifier manufacturers are going to proceed with developments taking it a new trend.