Riken Keiki has started to sell a multi-toxic gas detector “SC-9000” of portable type. A single unit of the new gas detector can be provided with up to three types of gas sensors. Conventionally a gas sensor has been required for each detector unit. However, the new model is now most suited for the semiconductor plants where two or more toxic gases are used.

The mountable sensors are divided roughly into two groups.

Group A captures hydrogen chloride, phosphine, silane, nitrogen oxide and nitrogen dioxide, while Group B can detect ammonia, chlorine, ozone and hydrogen fluoride. Up to three types of sensors can be chosen from Group A and maximum two types from Group B respectively. For instance, in case of assuming a gas leak detection of CVD device, the sensor of silane (Group A) for the film-forming process and ammonia and hydrogen fluoride (Group B) are loaded. The company says that there are more than 300 patterns to combine the sensors.

In addition to the intrinsically safe explosion-proof construction, SC-9000 has an excellent durability to clear the examination to withstand a 1.5m drop, dustproof and waterproof (equivalent to IP66/68) as well as its capability to meet a wide range of temperature environment ranging from minus 20℃ to plus 50℃. So, the company now foresees diverse applications to petrochemical plants and ships (such as fuel ammonia, ozone to treat ballast water or chlorine) and also phosphine for fumigation other than the semiconductor-related applications.

In July the company started to receive orders for delivery in August. Having a sales target of 1000 units per year, the company wishes to develop the business extensively.