Air Water Mechatronics (AWMX) of the Air Water group dealing with electronics-related equipment received an order for the CMP slurry mixing/supply system from Rapidus which aims at the domestic production of cutting-edge semiconductors.

No information of the size and amount of order is disclosed. The company will deliver the system as an automated conveyance technology of crude material containers aiming for the operation of the pilot line to the plant (IIM-1) under construction in Chitose, Hokkaido planned to start operation in April 2025, in the form to associate with the Transport Robot AMR “WILL-FA” developed by REALIZE.

The CMP Slurry Mixing/Supply System is a facility to unify the concentration and the particle diameters of slurry (a kind of chemical used in the polishing process of semiconductor) to meet the type of liquid, so that a stable and high-precision formulation may be realized.

Based on the key technology brought in the collaboration with Megafluid System of the U.S., the company has a lot of experiences in designing and producing the optimum supplying system for the domestic semiconductor plants.

With regard to the order received this time, it seems that Rapidus has highly evaluated the stable supply system judging from the past deliveries to the cutting-edge semiconductor plants and the solution to the automated system.

The wafer planarization process in the deposition of semiconductor production is requiring higher precision as the technology to support miniaturizing and multilayering. The system is now an indispensable device to secure a stable supply of materials in the polishing process to attain planarization of wafers.

AWMX is planning to take advantage of this order to proceed to propose a supply-system solution for the domestic semiconductor plants which are expected to make further investment for expansion and aims to contribute to customer’s automation, labor saving and stable operation.