Kanto Denka Kogyo will strengthen Kanto Denka Fine Products KOREA (FPK) to expand its specialty gas production capacity. FPK is the local subsidiary of Kanto Denka Kogyo which produces and sells specialty gas for use with semiconductor and flat panel displays.

The company has already borrowed around 25,000 m2 of premises adjacent to the existing site. The premises is around three times the size of the existing plant.

As the reason for the investment, the company stated that “We will cope with the expansion of production by Korean semiconductor manufacturing companies.”

FPK is handling three kinds of specialty gas of carbonyl sulfide (COS), carbon tetrafluoride (CF4), and chlorine trifluoride (ClF3).　It will consider about what gas it will produce at the new plant.