Kanken Techno Co., Ltd. (President: Hiroshi Imamura) a dedicated manufacturer of environmental preservation equipment. They achieved its cumulative sales of over 1000 units of atmospheric plasma-type gas abatement system “KPL” Series as of April 2016 which have been on the market since 2011.

Kazuhiro Maekawa of Sales Division Manager says, “It is our greatest hit product when we see the move of inquiries and so on since the start of sale in 2011.” When it comes to the reason of successful sales, he pointed out that a high evaluation is placed upon the feature of no emission of CO2 at the time of treating waste gases and the inexpensive disposition of persistent waste gases like CF4 or N2O.

The atmospheric plasma-type gas abatement system “KPL” Series treats waste gases discharged from the production process of semiconductor or liquid crystal panel with electric power and water. Comparing to the other methods which exhaust out CO2 or industrial wastes in treatments, the product excels in more energy saving, less environmental load and lower running cost. With respect to the reduction of global warming effects, the users of the equipment today highly evaluate the system and the conventional electric heating means.

Furthermore, as the plasma-type system enables plasma discharging at about 5000℃ under the atmospheric pressure by electric output, it presents a high decomposing rate against such persistent substances as CF4, SF6 and N2O. The system, as its own technology, is also effective to suppress the corrosion of plasma-irradiating part resulting in the reduction of total running cost on account of the decomposition allowing no direct entry of waste gases to be treated into the plasma output zone.

Regarding the future market of waste gas abatement system, Fumihiko Saito an associate director of the company commented, “There still will be a trend of growing demand for the characteristic properties of atmospheric plasma system or electric heating equipment which contribute to energy saving, reduction of environmental load and lower running costs. There also will be a trend to launch into the market equipment to enable large-sized treatments responding to 3-D movements in the semiconductor production process and increased waste treating volumes to catch up with up-sized LCD.”