OKI Engineering Co., Ltd. (President: Yasunori Shibata) which is engaged in the business to develop exhaust gas processors and the examination, assessment and analysis as to reliability of electronics equipment has developed and is verifying “KGT-100LM-GX” of the exhaust gas processor for “the development of device to grow a high-quality bulk GaN by the THVPE method”. It is jointly researched by Tokyo University of Agriculture and Technology (TUAT) and Taiyo Nippon Sanso (TNSC). The device employs a wet-type treating system with a processing capacity of 100ℓ/min, and its commercial use will be considered in the future.

The joint research by TUAT and TNSC is aimed to contribute to a mass production of GaN substrates through realization of the THVPE which brings quicker growth than the conventional HVPE method (hydride vapor phase epitaxy) and to develop a device for the production of bulk GaN material corresponding to silicon crystallization. In July 2013 it was adopted for the NexTEP project implemented by Japan Science and Technology Agency for the planned researches by the year of 2018.

In the research NH3 and Cl2 are emitted. As the former is hazardous due to its poisonous, corrosive and odorful properties and the latter is toxic, the exhaust gas treatment becomes necessary.

In the background to adopt Oki Engineering’s device there are merits that NH3 can be treated with sulfuric acid and Cl2 with the scrubber utilizing caustic soda, and that the setting ease and operating experiences can be of good help enabling device developments for the limited space of installation, according to Kenichi Takamatsu, associate director of the company.

Oki Engineering has devoted to deliver engineering solutions including sales and production for wet-type exhaust gas processors since 1980’s. The company achieved a sales record of 650 units by the end of 2015. This business occupies 60% of their total sales. Currently main customer is semiconductor industry for use with CVD chamber. Mr.Takamatsu expects for outlook of the business, “we anticipate that demand of the exhaust gas processor will continue to increase for use with LED, LCD, and power semiconductors.” The company is putting more effort on sales activities.