“Before the year is out, Showa Denko will put on sale the HB-3000, a new hybrid-type system for decomposing perfluoro carbons (PFCs). It combines two different decomposition systems, namely, a chemical capture system and a catalytic decomposition system.

An adsorbent is automatically and directly fed into the system through a large hopper located on top of the facility based on the use of compressed air. There is no capacity limit due to the restrictions on the capacity of the equipment that holds the adsorbent because a system is used which automatically supplies and exhausts the absorbent. The exhaust gas treatment capacity is maintained at the same level as that of a conventional large-sized catalytic decomposition system (3,500 liters per minute). It can be installed in a 20ft container because no after-treatment process is required. Running costs associated with the adsorbent and water treatment have been reduced. The calcium fluoride (CaF2) generated as a result of the capture of fluorine can be recycled as synthetic fluorite.

In contrast, the chemical capture system type which the company has had in its lineup up to now does not require waste water treatment, and CO2 emission is low. However, the cost of exchanging the high performance absorbent which simultaneously immobilizes the fluorine generated by the PFC decomposition is high, while the amount of gas treated is limited to 200 liters a minute due to the limitation of the equipment which holds the absorbent. The catalyst type absorbs the fluorine generated with the PFC catalyst decomposition into water so that running costs are low. Large type facilities can be made and large flow volumes can be treated. However after-treatment of the waste water is required. The company went ahead to develop the new product to resolve the issues related to the two types.

Showa Denko has positioned itself to raise the sales of this facility from the ¥2 billion of 2012 to ¥3 billion in 2015. Regarding its semiconductor high purity gas business, along with this facility, as an area of growth and development, the company is anticipating growth in the LCD and semiconductor areas, chiefly for the overseas market, such as the one in China.”